
Gas flow rate
For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.
The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.
The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.
High performance thermal sensor pressure insensitive mass flow module installed with piezo actuator valve. High reliability and all metal.
The digital mass flow controller for high-temperature environment, from 15 ℃ to 120 ℃. Digital/Analog communication.
A best-seller mass flow controller for high temperature environments