Low cost mass flow controller SEC-400MK3/500MK3

Vue d'ensemble

Low cost model of SEC-400 series

Fonctions

  • Flow rate control valve                                                                                                                                           Thermal valve
  • Low cost

Fabriqué par HORIBA STEC

Caractéristiques

SEC-400MK2

 

Materials at gas contact area

SUS316, Viton®

Valve type

Open at power-off: O

Standard flow rate range

(N2 equivalent F.S.)

10/20/30/50/100

200/300/500 SCCM

1/2/3/5 SLM

Flow rate control range

5 to 100% F.S.

Accuracy

± 2% F.S.

 

 

SEC-400MK3

 

Materials at gas contact area

SUS316, Viton®

Valve type

Open at power-off: O

Standard flow rate range

(N2 equivalent F.S.)

10/20/30/50/100

200/300/500 SCCM

1/2/3/5 SLM

Flow rate control range

5 to 100% F.S.

Accuracy

± 2% F.S.

 

 

SEC-500MK2

 

Materials at gas contact area

SUS316, Viton®

Valve type

Open at power-off: O

Standard flow rate range

(N2 equivalent F.S.)

10/20 SLM

 

Flow rate control range

5 to 100% F.S.

Accuracy

± 2% F.S.

 

 

SEC-500MK3

 

Materials at gas contact area

SUS316, Viton®

Valve type

Open at power-off: O

Standard flow rate range

(N2 equivalent F.S.)

10/20 SLM

 

Flow rate control range

5 to 100% F.S.

Accuracy

± 2% F.S.

※The SEC-400MK3 and SEC-500MK3 are compatible with the following gases:Air, N2, O2, Ar, H2, He

Schémas

Dimensions for SEC-400MK3 and SEC-500MK3
Schematics for SEC-400MK3 and SEC-500MK3