
HF Monitor
Ideal for hydrofluoric acid monitoring in semiconductor manufacturing
High precision, high-speed measurement of low concentrations of HF, HCl, and NH3. Resistance sensor.
Wide range HF concentration monitor from low to undiluted liquid. High precision measurement with auto range switching function. All PFA sensors.
Middle range HF / HCl concentration Monitor. The sensor is highly resistant to chemicals.
Measurement range: 0 -10%