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Sommaire » Semi-conducteurs Products Product Lines Gas Concentration Monitor

Gas Concentration Monitor

Vapor Concentration Monitor IR-300

Vapor Concentration Monitor IR-300

In-line compact vapor concentration monitor, enables MOCVD precursor delivery to be stable.

IR-200

Gas Monitor for Chamber Cleaning End Point Monitoring IR-200

Monitors SiF4 gas concentration in real time, and identifies the cleaning end-point based on SiF4 gas concentrations.

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