Semiconductors

CMP slurry particle size analysis

Slurry particle size analysis of tens of nm using centrifugal sedimentation method

We detected differences in single nm levels of colloidal silica. Effective for identifying the presence or absence of a coating agent on the surface of colloidal silica.

Centrifugal nanoparticle analyzer Partica CENTRIFUGE

  • Realizes precise particle size distribution measurement from undiluted solutions to dilute samples (corresponding particle sizes: 10 nm to 40 μm)
  • Captures even small amounts of foreign matter and agglomerates.
  • Equipped with a cooling mechanism that allows stable measurement even over long periods of time.
Partica CENTRIFUGE
Partica CENTRIFUGE

Analyseur de nanoparticules à centrifugation

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