High Precision TMAH Concentration Monitor
Accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions in semiconductor manufacturing. Repeatability: within +/- 0.003%. Measurement range : 0 - 3 %. Have the chemical resistant carbon sensor.
Model name | HE-960H-TM-S |
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Target of measurement | TMAH |
Measurement range | Concentration: 0 - 3%, Conductivity: 0 - 1000mS/cm |
Repeatability | Within +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity) |
Linearity | Within +/- 0.003wt% (Using equivalent input for conductivity) |
Transmission output | Number of output: 4 |
Contact output | Outputs: 5 points |
Communication output | RS-485 |
Power supply | 24V DC +/- 10% 10W |
Compatible sensor | FES-510 Series |
Wetted material of sensor | GC, PFA, Karletz® |
Schematics
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