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IT-470F-H Brochure English
IT-470F-H
High-Accuracy Infrared Thermometer [Built-in type]
Industry Leading* High Accuracy Thermometer
The IT-470F-H is a built-in type, non-contact infrared thermometer with industry-leading* accuracy. It contributes to improve process stabilization, for which requires high accuracy temperature measurement, such as semiconductor and FPD production.
*Resuts of 2017 in-house study
Segment: Process And Environmental
Division: Thermometer
- Absolute high measurement accuracy ±0.1°C* and superior repeatability(2σ) of 0.1°C*.
*Actual value, under given conditions.
Application
For semiconductor and FPD production which requires high accuracy temperature measurement
- In case of a susceptor is in a vacuum chamber
Temperature measurement of a susceptor is possible from outside of a chamber through the window
- In case of surface temperature measurement of liquid crystal substrate in FPD production process.
As non contact measurement, surface is not damaged.
- In case of temperature controlling in polishing
As non contact measurement, surface is not damaged.
| Measurement wavelength | 8 to 14µm |
|---|---|
| Measurement temp. range | -50 to 200℃ |
| Output resolution | Optical digital output: 0.1℃ Current output ≤0.025%FS |
| Accuracy* (Optical digital output) | ±4.0℃ (Object temperature -50℃) ±0.8℃ (Object temperature -20℃) ±0.6℃ (Object temperature 0℃) ±0.5℃ (Object temperature 23℃) ±0.4℃ (Object temperature 100℃〜) (Linear interpolation is applied for the mid-points of object temperature and interpolated data are rounded to one decimal place.) |
| Repeatability (Optical digital output) | 0.7℃ (Object temperature -50℃) 0.5℃ (Object temperature 23℃) 0.5℃ (Object temperature 200℃) (In case of the emissivity = 1.000 and use the 2σ value of 10 times measurement) |
| Response time (Optical digital output) | Optical digital output: ≤1.4 sec (running average 1 sec, at 95% response) |
| Data sampling period | 0.1 sec |
| Display update period | Optical digital output: 0.2 sec Current output: 0.1 sec |
| Measuring diameter | Φ8mm/Distance 150mm (incident light amount 90%) |
| Emissivity setting | 0.001 to 1.000 changeable (Setting at factory shipping) |
| Operating temp. & humidity | 0 to 55℃, 35〜85%RH (no condensation) |
| Power | DC24V±5% |
| Function | Optical digital output (JIS F05) Current output 4 to 20ｍA (Load resistance 100Ω, non-isolated) |
| Dimensions | 55×44×96mm Power, Current cable attached (Standard length 2m) |
| Mass | ≤300g |
*Condition: Operating temperature 24 to 29℃ (include temperature of attachment), Humidity 55±20%, Emissivity correction setting 1.000.
