discontinued Ce produit a été abandonné et n'est plus disponible. Vous pouvez toujours accéder à cette page à des fins d'information.

Plasma Profiling TOFMS

PP-TOFMS-HORIBA
Plasma Profiling TOFMS video: short introduction to PP-TOFMS technique
Plasma Profiling TOFMS webinar: PP-TOFMS in the cleanroom of CEA-LETI

Ultra-Fast, Sensitive and High Resolution Depth Profiling technique

Plasma Profiling TOFMS addresses the needs of materials scientists across a wide range of application areas. PP-TOFMS provides fast elemental depth distribution of any inorganic material. The speed and ease of use of PP-TOFMS permit to reduce optimization time of growth processes as many research scientists strive to reduce the time from discovery to applications of new materials.

The simultaneous full coverage of TOFMS available for each point of depth permits the detection of non suspected contamination. This is key for failure analysis and optimization of thin film processes that tend to no longer be based on ultra-high grade methods (i.e. ink jet printing…).

PP-TOFMS is an ideal close-to-process tool for materials scientists:

  • To check on stoichiometry versus depth of layers ranging from nm to tens of microns
  • To determine doping depth distribution
  • Identify unsuspected contamination
  • Monitor interface composition and width
Segment: Scientific
Division: GDOES
Fabricant: HORIBA France SAS

PP-TOFMS instrument is

  • Compact
  • Rapid
  • Easy to get hands on
  • General application in materials science
  • Multi-user

 

 

 

  • Glow discharge Plasma Source
  • Unique patented RF pulsing mode
  • No sample preparation, no sample transfer in UHV environment
  • Easy (flat Horizontal) and ergonomic sample positioning with laser help
  • High sample tolerance size from 0.7 cm to 30 cm
  • Standard 4 mm anode (4 mm ⌀ crater)
  • Available 2 mm anode (2 mm ⌀ crater)
  • Oil free environment (Dry pump)
  • Easy removal and cleaning of source parts

 

TOF analyzer

  • Orthogonal extraction
  • High resolution reflectron (resolving power up to 5000 at 208 Th)
  • User friendly, ergonomic, fast hands on
  • Possibility to filter out up to four intense ions for high dynamics: user choice of ions and attenuation amplitude

 

Software

  • Fast automatic starting procedures
  • Real time display of depth profiles
  • One click semi-quantitative depth profile
  • Remote online capability

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.

Related products

Auto SE
Auto SE

Spectroscopic Ellipsometer for Simple Thin Film Measurement

EMGA-Expert
EMGA-Expert

Analyseur d'oxygène/azote/hydrogène
(modèle haute précision)

EMGA-Pro
EMGA-Pro

Analyseur d'oxygène/azote (modèle d'entrée de gamme)

GD-Profiler 2™
GD-Profiler 2™

Le spectromètre d'émission optique à décharge luminescente ouvre de nouveaux horizons d'information

LabRAM Odyssey
LabRAM Odyssey

Imagerie Confocale Raman et Spectromètre à Haute Résolution

LabRAM Soleil
LabRAM Soleil

Microscope Confocal Multimodal Raman

Logiciel GDOES
Logiciel GDOES

Quantum et Image

Smart SE
Smart SE

Powerful and Cost Effective Spectroscopic Ellipsometer

UVISEL Plus
UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

XploRA™ PLUS
XploRA™ PLUS

Spectromètre Raman – Microscope confocal Raman

Accessoires GDOES
Accessoires GDOES

Accessoires pour échantillons de formes ou structures diverses

GD-Profiler 2™
GD-Profiler 2™

Le spectromètre d'émission optique à décharge luminescente ouvre de nouveaux horizons d'information

ICP Neo
ICP Neo

ICP Software

ICP-OES
ICP-OES

Complete your ICP-OES Spectrometer for your specific needs

Logiciel GDOES
Logiciel GDOES

Quantum et Image

MESA-50
MESA-50

X-Ray Fluorescence Analyzer

MESA-50K
MESA-50K

Analyseur de fluorescence X

Ultima Expert
Ultima Expert

Spectromètre ICP-OES haute résolution, haute sensibilité et haute stabilité

Ultima Expert LT
Ultima Expert LT

Spectromètre ICP-OES haute performance au tarif abordable

XGT-9000
XGT-9000

Microscope d'analyse X (Micro-XRF)

XGT-9000SL
XGT-9000SL

Microscope d'analyse X à très grande chambre

Corporate