Vacuum Ultra Violet Spectroscopy

Taking the advantage of his leading position in the design and realization of diffraction grating, HORIBA Scientific has developed over the last past 35 years some of the most innovative Vacuum Ultra Violet (VUV) monochromators for synchrotron centers and scientific community. These monochromators, which combine the ultimate advanced diffraction grating technologies and for some ultra precise under vacuum mechanics, have been installed in several synchrotron centers and have demonstrated superior performances.

Today the development of new compact VUV sources and applications requires compact VUV monochromators. Based on diffraction grating capabilities and our large experience acquired in the difficult and demanding market of under vacuum synchrotron monochromators HORIBA Scientific has developed a wide offer of compact monochromators for application such as Extreme UV lithography or soft X-ray Photoemission Spectroscopy.

Using our double expertise in optical and mechanical design, as well as our large offer of monochromators we are able to propose a wide range of fully integrated VUV systems. These systems are provided with sources, sample chambers, monochromators and detection and are controlled by HORIBA Scientific software. Based on modularity designs, different configurations can be realized in order to answer to the requirements of your particular application.