IR-200

Gas Monitor for Chamber Cleaning End Point Monitoring IR-200

Gas Monitor for Chamber Cleaning End Point Monitoring

The IR-200 monitors SiF4  gas concentration in real time and identifies the cleaning end-point based on SiF4 gas concentrations.

Segment: Semiconductor
Fabricant: HORIBA, Ltd.
  • Monitor SiF4 concentration up to 5000 ppm
  • Compact design
  • Can be instralled into exhaust lines
  • In addition to SiF4, this gas monitor can be used to measure CIF3 and other gases.

 

Model nameIR-200
Measurement GasSiF4 gas
Measurement Range0 to 5000ppm(0 to 500Pa)
Repeatability

±1%F.S.

Cell length30mm, 1.2 in
Response Time30 seconds or less (T90)
Pressure Resistance0.3MPa(A)
Gas Cell Heating Temperature150 ℃ (Max)
Contact MaterialSUS-316L、BaF2、FKM
Leak Rate1×10-10Pa・m3/s
FittingNW25 Flange
Analog Output4 to 20 mA DC
Contact Output3 channels (ERR、High、Low)
Contact Input1 channel for zero calibration
Power24 V DC, 30 W (Max)
Dimension (W x H X D)

Sensor： 150×268×90mm / 3.5x5.9x10.6 in

Controller： 48×96×130mm / 1.9x3.8x5.1 in

Mass

Sensor：4.5kg / 9.9 lb

Controller：0.5kg / 1.1 lb

Request for Information

Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

Related products

51 series
More 51 series

Explosion-proof Gas Analyzer

AP-370 series
More AP-370 series

Air Pollution Monitor

APCA-370
More APCA-370

Ambient Carbon Dioxide Monitor

APHA-370
More APHA-370

Ambient THC monitor

APMA-370
More APMA-370

Ambient Carbon Monoxide Monitor

APNA-370
More APNA-370

Ambient NOx Monitor

APNA-370/CU-2
More APNA-370/CU-2

Ambient Ammonium Monitor

APOA-370
More APOA-370

Ambient Ozone Monitor

APSA-370
More APSA-370

Ambient Sulfur Dioxide Monitor

APSA-370/CU-1
More APSA-370/CU-1

Ambient Hydrogen Sulfide Monitor

AQMS
More AQMS

Air Quality Monitoring System

CEMS
More CEMS

Continuous Emission Monitoring System

ENDA-5000 series
More ENDA-5000 series

Stack Gas Analysis System

FTX-ONE
More FTX-ONE

FTIR Exhaust Gas Analyzer

GA-370
More GA-370

Trace Gas Monitor

GI-700 series
More GI-700 series

Stack Gas Analyzer

IR-300
More IR-300

Vapor Concentration Monitor

IR-400
More IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

MEXA-1170HCLD
More MEXA-1170HCLD

Heated Type NOx Analyzer

MEXA-1170HFID
More MEXA-1170HFID

Heated Type THC Analyzer

MEXA-1170SX
More MEXA-1170SX

Motor Exhaust Gas Sulfur Analyzer

MEXA-1300R
More MEXA-1300R

Motor Exhaust Gas Analyzer

MEXA-584L
More MEXA-584L

Automotive Emission Analyzer

MEXA-ONE
More MEXA-ONE

Motor Exhaust Gas Analyzer

MEXA-ONE-FT
More MEXA-ONE-FT

FTIR Motor Exhaust Gas Analyzer

MEXA-ONE-QL-NX
More MEXA-ONE-QL-NX

Laser Spectroscopic Motor Exhaust Gas Analyzer

OBS-ONE GS Unit
More OBS-ONE GS Unit

On-board Emissions Measurement System

PG-300 series
More PG-300 series

Portable Gas Analyzer

Process
More Process

Process Analyzer System

PX-375
More PX-375

Continuous Particulate Monitor with X-ray Fluorescence

TX-100
More TX-100

Tunable Laser Gas Analyzer

VA-5000 / VA-5000WM Series
More VA-5000 / VA-5000WM Series

Multi-Component Gas Analyzer

51 series
More 51 series

Explosion-proof Gas Analyzer

AP-370 series
More AP-370 series

Air Pollution Monitor

APCA-370
More APCA-370

Ambient Carbon Dioxide Monitor

APMA-370
More APMA-370

Ambient Carbon Monoxide Monitor

EMGA-920
More EMGA-920

Oxygen/Nitrogen Analyzer

EMGA-921
More EMGA-921

Hydrogen Analyzer

EMGA-930
More EMGA-930

Oxygen/Nitrogen/Hydrogen Analyzer

EMIA-Expert
More EMIA-Expert

Carbon/Sulfur Analyzer

EMIA-Pro
More EMIA-Pro

Carbon/Sulfur Analyzer

EMIA-Step
More EMIA-Step

Carbon/Sulfur Analyzer

ENDA-5000 series
More ENDA-5000 series

Stack Gas Analysis System

GA-370
More GA-370

Trace Gas Monitor

GI-700 series
More GI-700 series

Stack Gas Analyzer

IR-300
More IR-300

Vapor Concentration Monitor

IR-400
More IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

LO-300
More LO-300

Laser scanning Oil Film Detector

MEXA-1300R
More MEXA-1300R

Motor Exhaust Gas Analyzer

MEXA-584L
More MEXA-584L

Automotive Emission Analyzer

MEXA-ONE
More MEXA-ONE

Motor Exhaust Gas Analyzer

OBS-ONE GS Unit
More OBS-ONE GS Unit

On-board Emissions Measurement System

OCMA-500
More OCMA-500

Oil Content Analyzer

OCMA-550
More OCMA-550

Oil Content Analyzer

PG-300 series
More PG-300 series

Portable Gas Analyzer

TX-100
More TX-100

Tunable Laser Gas Analyzer

VA-5000 / VA-5000WM Series
More VA-5000 / VA-5000WM Series

Multi-Component Gas Analyzer

Dry Process Control News