HORIBA - Semiconductor

Fluid Control

HORIBA has a diverse range of products to cater for your fluid measurement and control requirements.

In a variety of manufacturing processes and research laboratories we offer precise measurement and reliable control of gas and liquids.  HORIBA is the recognised leader of high performance mass flow meters, mass flow controllers, automatic pressure controllers and liquid vaporization systems used throughout the cutting edge semiconductor manufacturing industry.

Mass Flow Control

D500

Pressure Control

GR-200

Liquid Source Vaporization System

MV-2000

Gas Generator Systems

MU Series

Browse Products

CRITERION D500
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Pressure Insensitive Mass Flow Module

DZ-100
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Ultra-thin Mass Flow Controller

EC-5000 Series
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Exhaust Pressure Controller

FS-3000
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Thermal Flow Splitter

GR-300 Series
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Wafer Back Side Cooling System

LE Series
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Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
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Digital Liquid Mass Flow Meters / Controllers

MI-1000/MV-1000
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Mixed Injection System Liquid Vaporizers

MV-2000 Series
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Mixed Injection System Liquid Vaporizer

PV Series
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Piezo Actuator Valve

SEC-8000 F/D/E Series
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High Temperature Digital Mass Flow Controller

SEC-N100 Series
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Digital Mass Flow Controller

SEC-Z500X
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Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
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Pressure Insensitive Mass Flow Controller

UR-Z700 Series
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Digital Automatic Pressure Regulator

VC Series
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Direct Liquid Injection System

XF-100 Series
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Digital Liquid Mass Flow Meters

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