HORIBA - Semiconductor

Fluid Control

HORIBA has a diverse range of products to cater for your fluid measurement and control requirements.

In a variety of manufacturing processes and research laboratories we offer precise measurement and reliable control of gas and liquids.  HORIBA is the recognised leader of high performance mass flow meters, mass flow controllers, automatic pressure controllers and liquid vaporization systems used throughout the cutting edge semiconductor manufacturing industry.

Mass Flow Control


Pressure Control


Liquid Source Vaporization System


Gas Generator Systems

MU Series

Browse Products

En savoir plus CRITERION D500

Pressure Insensitive Mass Flow Module

En savoir plus DZ-100

Ultra-thin Mass Flow Controller

EC-5000 Series
En savoir plus EC-5000 Series

Exhaust Pressure Controller

En savoir plus FS-3000

Thermal Flow Splitter

GR-300 Series
En savoir plus GR-300 Series

Wafer Back Side Cooling System

LE Series
En savoir plus LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
En savoir plus LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

En savoir plus MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MV-2000 Series
En savoir plus MV-2000 Series

Mixed Injection System Liquid Vaporizer

PV Series
En savoir plus PV Series

Piezo Actuator Valve

SEC-8000 F/D/E Series
En savoir plus SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-N100 Series
En savoir plus SEC-N100 Series

Digital Mass Flow Controller

En savoir plus SEC-Z500X

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
En savoir plus SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

UR-Z700 Series
En savoir plus UR-Z700 Series

Digital Automatic Pressure Regulator

VC Series
En savoir plus VC Series

Direct Liquid Injection System

XF-100 Series
En savoir plus XF-100 Series

Digital Liquid Mass Flow Meters


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