Semiconductors

CMP slurry particle size analysis

Slurry particle size analysis of tens of nm using centrifugal sedimentation method

We detected differences in single nm levels of colloidal silica. Effective for identifying the presence or absence of a coating agent on the surface of colloidal silica.

Centrifugal nanoparticle analyzer Partica CENTRIFUGE

Realizes precise particle size distribution measurement from undiluted solutions to dilute samples (corresponding particle sizes: 10 nm to 40 μm)
Captures even small amounts of foreign matter and agglomerates.
Equipped with a cooling mechanism that allows stable measurement even over long periods of time.

Partica CENTRIFUGE

Centrifugal Nanoparticle Analyzer

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

First name

Last name *

Company or Institution *

Postal code *

City

Country/Region *

State

Email address *

Phone

HORIBA Department

Your message *

I have read and agree to the HORIBA privacy notice

* These fields are mandatory.