Semiconductors

Thin film analysis in liquid

Analysis using a spectroscopic ellipsometer liquid measurement cell

Swelling of thin polymer films in liquid can be easily evaluated.

Evaluation of optical constants for film thickness on the order of Å
The phase modulation method and temperature control function, which do not involve mechanical movement, suppress the effects of vibrations and enable reliable evaluation with a high signal-to-noise ratio.
Film thickness evaluation up to 85 μm (depending on film condition)
High wavelength resolution and unique optical system enable film thickness evaluation over a wide range.

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

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