D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose the new pressure based MFC D700MG, the upper compatible model of the D500MG to support customer’s challenges.

 

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.

Selection of countries and territories where this product is available:
China,Germany,Ireland,Israel,Italy,Japan,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
View the complete list here.

  • On-Tool Gas and Full Scale Configuration Change *Only EtherCAT 

    • Provide flexibility to process optimization  

  • 100ms Step-up Response & MFC-to-MFC deviation control 

    • Deliver high productivity and greater process performance 

  • MRMG functionality for small flow rate(Bin101 – Bin105) 

    • Provide flexibility to process requiring small flow rate 

  • Better Valve Shut-off and Corrosion Resistance by PFA nozzle 

    • Robustness with less particle risk reduce down time and optimize yield  

  • State Monitor Function 

    • Provide more internal data for smarter failure prediction  

Output items of state monitor function

Flow/Pressure zero adjustment counts 

Valve drive counts 

Record of max/min P0,P1,P2 pressure 

Record of max/min Block temperature 

Total time over/below pressure spec. 

Total time over/below temperature spec. 

Total working time 

Total control time 

Total flow time (per calibration instance) 

Total flow rate (per calibration instance) 

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.

Related products

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module

CVS-ONE
CVS-ONE

Constant Volume Sampler

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

EXFM-ONE
EXFM-ONE

Ultrasonic Exhaust Flow Meter

FQ Series
FQ Series

Fuel Flow Measurement Systems

FS-3000
FS-3000

Thermal Flow Splitter

HyFQ-2000 Series
HyFQ-2000 Series

Hydrogen Fuel Flow Meter

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

MI-1000/MV-1000
MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PTFM-1000V2
PTFM-1000V2

Pitot Tube Exhaust Flow Meter

PTFM-ONE-DT
PTFM-ONE-DT

Dual Pitot Tube Exhaust Flow Meter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

VC Series
VC Series

Direct Liquid Injection System

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

FS-3000
FS-3000

Thermal Flow Splitter

PTFM-ONE-DT
PTFM-ONE-DT

Dual Pitot Tube Exhaust Flow Meter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

VG-200S
VG-200S

Capacitance Manometer

Corporate