Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
UR-Z700 Series
Digital Automatic Pressure Regulator
The high performance auto pressure regulator UR-Z700 Series has electronic regulators with high-precision pressure sensors and high resolution, fast response piezo actuator valves. They control the pressure relative to the external control signal that they receive. For both Digital/Analog and DeviceNet™ communications.
Benefits:
- Eliminates the effects of cross talk caused by the switching of high flow lines
- Fast response: within 0.5 seconds
- Flexible design: these regulators can be mounted in any position or attitude, and because they use an electric signal for control they are suitable for a wide variety of gas supply systems
- Line-up of Inlet control type (-B type), Outlet control type
- Choose between gauge pressure type or absolute pressure type
- RoHS compliant (UR-Z704 series)
- Ultra clean: all metal construction (M type).
External Dimension
