Materials Analysis

HORIBA's instruments can detect and analyse particles on photomask. For organic and polymer materials, RAMAN is used to analyze the detected foreign particles on a mask such as nylon, hair and cosmetic. For metal materials,XGT-9000 is used to analyze the detected foregin particles on a mask such as Ni, Al and Cr.

Ellipsometry is used to monitor thickness and optical constant (Réflective index (n) and Extinction Coefficient (k)) of pellicle on photomask.

Pellicle Thickness Analysis

Evaluates the thickness uniformity of the next generation pellicle.

Particle Object Identification

Useful for investgating problems by analyzing foreign matter components on the reticle.

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