Material Characterization

Ultra-thin film makes it difficult to measure film thickness and refractive index

Exhibition Panels

Chemical Mechanical Planarization

Various analytical measurement technologies in the CMP process

Quantum Dots

Measurement of quantum dot emission and emission lifetime

Material & Thin Film Characterization

Various analytical measurement technologies for evaluation of physical properties and thin films

Plasma diagnosis

Various customizations from plasma diagnosis to process end point detection and chamber state management

Product Catalogs

Centrifugal Nanoparticle Analyzer

Partica Centrifuge

Laser Scattering Particle Size Distribution Analyzer

Partica LA-960V2

Nanoparticle Analyser

NanoPartica SZ-100V2

Non-contact Chemical Concentration Monitor

CS-900

Micro Volume pH Monitor

UP-100

 

Spectroscopic Ellipsometer

UVISEL Plus

 

Florescence and Absorbance Spectrometer

Duetta

TCSPC Lifetime Fluorometer

DeltaFlex

Spectroscopic Ellipsometer for Simple Thin Film Measurement

Auto SE

 

Cathodoluminescense

HORIBA CLUE Series

Raman Microscope

LabRAM HR Evolution

X-Ray Analytical Microscope

XGT-9000

 

Raman Microscope

LabRAM Soleil

Glow Discharge Optical Emission Spectrometer

GD-Profiler2

AFM-Raman for Physical and Chemical imaging

XploRA Nano

Vapor Concentration Monitor

IR-300

Oxygen & Nitrogen Analyser

EMGA-Pro / Expert

Fluorescence Spectrometer

Fluorolog-QM

Miniature Multi Communication UV-NIR Spectrometer

VS70-MC

UV-VIS-NIR Spectrometer

OES-Star

Mid-Focal Length Imaging Spectrometers

iHR Series

Multispectra, Multifiber, Multichannel Imaging spectrometer with 8-16-32 Simultaneous UV-NIR Spectra

PoliSpectra® M116 MultiTrack Spectrometer

Most Compact Vacuum UV Back-Illuminated CCD Spectrometer (VUV-FUV)

VU90 Spectrometer

Corporate