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Facilities

"Measurement" is significant to keep the environment conservation.

HORIBA's measuring techniques contribute to the safe and secure work environment such as clean room, water discharge, and air ventilation.

Facilities includes: 

  • Clean Room Solution
  • Ultra Pure Water
  • Exhaust Gas
  • Waste Water Treatment
  • Recycle

 

Clean Room Solutions

Semiconductor Processing - Clean Room

Ultra Pure Water

Waste Water Treatment

Exhaust Gas

Recycle

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Mass Flow Controller

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Digital Mass Flow Controller

SEC-Z700S Series
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New concept Pressure Insensitive Mass Flow Controller

VG Series
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Capacitance Manometer

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