HD-960LR

Dissolved oxygen concentration monitor series for semiconductor manufacturing

Ideal for measuring dissolved oxygen concentration in Wet Process from Front-end of Line to Back-end of Line.By adopting a chemical resistant sensor, it is possible to support a wide range of dissolved oxygen concentration measurements from facility to process usage.

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

The latest model of dissolved oxygen monitor HD-960LR

Dissolved oxygen concentration can be measured even with the chemical conditions below.

  • Ammonia concentration is 1% or lower, sample temperature is 25 ℃ ±2 ℃
  • Organic solvent with boiling point higher than water

Able to measure dissolved oxygen concentrations of more types of chemicals used in semiconductor processes.

 

■ Comparison with previous models

 Latest modelPrevious models
 High flow rate and long lifeHigh flow rate
(Sample to circulate)
Low flow rate
(Sample to drain)
ModelHD-960LRHD-960L-MHD-960L
Sensor unit dimensionsW170 (200 ) x H95 x D135W120 (150 ) x H95 x D108W87 (117 ) x H131 x D94
Flow rate600 - 2000 mL/min (Sensor membrane: 25 μm)
400 - 2000 mL/min (Sensor membrane: 50 μm)
200 - 2000 mL/min
(Sensor membrane: 25 μm/50 μm)
15 - 200 mL/min
(Sensor membrane: 25 μm/50 μm)
Temperature20- 60 ℃20- 60 ℃10- 45 ℃
Pressure0 - 0.2 MPa0 - 0.2 MPa0 - 0.01 MPa
Response speed30 sec (90%) @400 mL/min30 sec (90%) @400 mL/min30 sec (90%) @200 mL/min
SampleAmmonia concentration is 1% or lower,sample temperature is 25 ℃ ±2 ℃
Organic solvent with boiling point higher than water.
Pure water
Low concentration HF
(5700 ppm or less)
Pure water
Low concentration HF
(5700 ppm or less)
Equipment configurationConverter: HD-960LR
Sensor unit: DO-120
Bottle unit: DO-120-B
Sensor: 5622
Connection cable: CK-05PS (5 m)
Relay cable: CK-01DO (1 m)
Converter: HD-960L-M
Sensor unit: DO-110
Sensor: 5611
Connection cable: CK-05PS (5 m)
Converter: HD-960L
Sensor unit: DO-100
Sensor: 5600
Connection cable: CK-05PS (5 m)

 

■Measurement data (In-house reference data)

 

Measurement condition▶ Sample: Ammonia (28%)
  • Membrane: 25 μm
  • Temperature: Room temperature
  • Conduct regular sensitivity check by measuring atmospheric air
 
Measurement result

Abnormal measurement tends to occur within 5
days of operation for the previous models. The
latest model is able to achieve stable measurements
for about 480 days.

Measurement condition▶ Sample:Organic solvent
  • Membrane: 50 μm
  • Temperature: 60 ℃
  • Conduct regular sensitivity check by
    measuring atmospheric air
 
Measurement result

Abnormal measurement tends to occur within 5
days of operation for the previous models. The
latest model is able to achieve stable measurements
for about 210 days.

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