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Brochure-HE-960LF
HE-960LF / FS-09F-1/2
Flat Carbon Sensor Conductivity meter
Perfect for Slurry concentration control
It is effective to keep the dilution of Slurry constant. Maintaining an appropriate conductivity value contributes to process stability in the wafer polishing process. Even highly viscous sample liquids such as CMP Slurry can be measured without problems because they use a sensor structure that reduces the risk of the sample liquid sticking to the electrodes. In addition, the sensor is made of a wetted material with excellent chemical resistance, which meets the cleanliness requirements of semiconductor processes. In addition to the above, it can also be used for introduction at the semiconductor process development stage and conductivity control of special chemicals.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
High accuracy / High stability
- Measurement range : 0 to 2,000 μS/cm , 0 to 10,000 μS/cm
- Repeatability : ± 0.5% F/S , ± 1.0% F/S
Metal contamination free
Since special carbon is used for the electrode material, there is no need to worry about metal contamination elution.
Equipped with concentration conversion function
Two types of concentration conversion are possible by inputting the relationship between the chemical concentration and conductivity and the temperature characteristics.
It is especially suitable for dilution control of low-concentration chemicals.
Space saving
The degree of freedom in installation layout is improved by downsizing from our conventional conductivity sensor.
Example of installation
■Specification conveter
| Product name | Conductivity meter | |||
|---|---|---|---|---|
| Model | HE-960LF | |||
| Measurement method | Electrode type（2-electrode method） | |||
| Temperature specifications sensor | Platinum resistance 1000Ω/℃ | |||
| Measurement range | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm | 0.0 to 200.0μS/cm | ||
| 0.0 to 200.0μS/cm | 0 to 2000μS/cm | |||
| 0 to 1000μS/cm | 0 to 10000μS/cm | |||
| ＊Measuring range of raw conductivity Switched with setting change | ||||
| Temperature | 0 to 100℃ Actual temperature measuring range depend on the performance of the sensor connected. | |||
| Concentration conversion | Option 1,2 | 0 to 10.000% Conversion formula is defined by user (temperature compensation and concentration conversion) | ||
| Repeatability | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm range | 0.0 to 200.0μS/cm range | Within ±0.5% full scale | |
| 0.0 to 200.0μS/cm range | 0 to 2000μS/cm range | |||
| 0 to 1000μS/cm range | 0 to 10000μS/cm range | Within ±1.0% full scale | ||
| Temperature | ±0.5℃ | |||
| Condition | Equivalent input | |||
| Linearity | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm range | 0.0 to 200.0μS/cm range | Within ±0.5% full scale | |
| 0.0 to 200.0μS/cm range | 0 to 2000μS/cm range | |||
| 0 to 1000μS/cm range | 0 to 10000μS/cm range | Within ±1.0% full scale | ||
| Temperature | ±0.5℃ | |||
| Condition | Equivalent input | |||
| Transmission output | Number of output：4 DC4 to 20mA / 0 to 20mA input/output isolated type Maximum load resistance : 900Ω Transmission output range : Free setting within measuring range (Negative terminals of each transmission output channel are connected inside and thus have the same electrical potential.) | |||
| Contact output | Number of relay：5 ALARM contact R1,R2,R3 and R4 Contact type relay : Relay contact, SPST (1a） Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load) Contact function Upper or lower ON/OFF alarm each measurement items. Contact action Closed when status is in the event. Opened when any erroneous status is normal or power is down. R1,R2 and R3 share a common terminal. Self diagnosis contact RF Contact type : relay contact , SPDT (1c) Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load) C-NO contact action : Closed when status is normal. Opened when any erroneous status is detected or power is down. R4 and RF share a common terminal. | |||
| Contact input | Number of input：1 | |||
| Contact type：open collector. No-voltage contact | ||||
| Function : Hold command | ||||
| Communication output | RS-485 communication | |||
| Self-check | Sensor diagnosis (Short-circuit and disconnection of the temperature sensor). Converter error | |||
| Temperature compensation of conductivity | ● Arbitrary temperature coefficient entry (reference temperature : 25℃, temperature coefficient : 0%/℃ to 5%/℃） ● Arbitrary temperature compensation formula entry (reference temperature : 25℃, formula is defined by user) ● No temperature compensation is performed. | |||
| Temperature compensation range | 0 to 100℃ The temperature compensation under 0℃ and over 100℃ is expanded by a function | |||
| Ambient temperature | 5 to 45℃ | |||
| Relative humidity | －25 to 65℃ | |||
| Power supply | Rated voltage 24 V DC, 10W (max.) | |||
| Structure | Indoor-use panel installation type Panel case ： ABS, terminal : PBT Panel : IP65 dust and water proof structure | |||
| Conforming standards | CE Marking | EMC Directive : EN61326-2-3 | ||
| FCC Rule | FCC Part15 | |||
| Mass | Approx. 550g | |||
| External dimensions | 96 (W) × 96 (H) × 115 (D) mm Case depth : approx. 105mm (when panel-mounted） | |||
| Compatible sensors | FS-09F-1/2 | |||
■Specification sensor
| Model | FS-09F-1/2 | FS-09F-1/2-200 |
|---|---|---|
| Wetted material | Glass carbon, PFA. Kalrez® 6375 | |
| pipe size | 1/2 inch | |
| Flow rate | 0L/min to 10 Keep enough flow rate to measure latest sample. | |
| Sample pressure | 0 to 0.3MPa (Temperature : 20 to 30 degree℃） | |
| Sample temperature | 20～30 degree℃ If the difference between the ambient temperature and the sample liquid temperature is 5 degree℃, a measurement error of about 1 degree℃ will occur. | |
| Cable length | Approx. 3.5m | |
Dimensions (mm)
