Semiconductor Page Heading

Fluid Control

HORIBA has a diverse range of products to cater for your fluid measurement and control requirements.

In a variety of manufacturing processes and research laboratories we offer precise measurement and reliable control of gas and liquids.  HORIBA is the recognised leader of high performance mass flow meters, mass flow controllers, automatic pressure controllers and liquid vaporization systems used throughout the cutting edge semiconductor manufacturing industry.

Mass Flow Control


Pressure Control


Liquid Source Vaporization System


Gas Generator Systems

MU Series

Browse Products


Pressure Insensitive Mass Flow Module

more DZ-100

Ultra-thin Mass Flow Controller

more EC-5000 Series

Exhaust Pressure Controller

more FS-3000

Thermal Flow Splitter

more GR-300 Series

Wafer Back Side Cooling System

more LE Series

Large Flow Liquid Source Vaporization Control System

more LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

more MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

more MV-2000

Mixed Injection System Liquid Vaporizer

more PV Series

Piezo Actuator Valve

more SEC-400 Series

Mass Flow Controller

more SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

more SEC-E Series

Mass Flow Controller

more SEC-N100 Series

Digital Mass Flow Controller

more SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

more SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

more UR-Z700 Series

Digital Automatic Pressure Regulator

more VC Series

Direct Liquid Injection System

more XF Series

Digital Liquid Mass Flow Meters

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.