HORIBA - Semiconductor

Liquid Source Vaporization System

HORIBA is one of the leading providers of high performance vaporizers. HORIBA’s liquid source vaporizers are used throughout the semiconductor manufacturing process to safely and efficiently deliver liquid precursors in gas phase to the point of use. Wherever a liquid precursor requires vaporizing in vacuum or atmospheric pressure, HORIBA have a vaporizing technique to offer a vaporizer to meet your requirements. HORIBA have more than 30 years vaporizing knowhow using direct injection, mixed injection, bubbling and baking vaporization techniques.

HORIBA’s Liquid Source Vaporizers can vaporize liquid materials stably and efficiently. Our vaporizers can also be linked to HORIBA’s range of automatic refill systems to provide safe and continuous delivery of vapor to the point of use. There is no downtime as bulk precursor tanks can be exchanged without interrupting the manufacturing process.

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Vapor Concentration Control
Semiconductor Manufacturing Process
Vapor concentration control of precursors provide substantial improvement in stabilizing MOCVD processes. By measuring a precursor partial pressure in a downstream line with a Non Dispersive Infrared (NDIR) technology and controlling its total pressure, a precursor concentration can be kept constant. This precursor concentration control is validated as a practical method against a temperature fluctuation of a cylinder bath and a failure of reaching a saturation pressure in a cylinder.
Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Testing and Laboratories
Liquid Source Vaporization and Supply in Research and Testing Laboratories
Testing and Laboratories
Gas Mass Flow Control and Measurement for Reference Value of PM2.5 Measurement
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Photovoltaic Manufacturing Process
Test Gas Generation in Research and Testing Laboratories
Test Gas Generation
Gas and Water Monitoring in Containers and Packaging
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process


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