Mixed Injection System MV-2000

High stability, compact mixed injection vaporizer system using the new vaporization method, "tornado flow". Suitable for vaporizing liquid sources pyrolyzed easily.

Mixed Injection System Liquid Vaporizer MI-1000/MV-1000 Series

Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

OM-51 Portble Dissolved Oxygen meter

This field-type dissolved oxygen meter measures dissolved oxygen concentration (DO), oxygen concentration (O2), saturation (SAT.RATIO) and temperature of water solutions. It uses a laboratory sensor to enable BOD measurement....

Multi-Component Gas Analyzer VA-5000 Series

Multi-Component Gas Analyzer VA-5000 Series is an all-round analyzer that fits today’s measurement needs ...

Wafer Back Side Cooling System GR-300 Series

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.