Automatic pressure regulators

The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...

Compact Baking System LSC Series

Best-selling, compact baking system suitable for a range of liquid source delivery applications. Easy maintenance.

Digital Auto Pressure Regulator

High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.

Digital Liquid Mass Flow Meters/Controllers LF-F/LV-F series

High precision liquid mass flow controller using the sensor with a unique cooling method. Can control from micro-liter to ultra low flow rate.

Direct Injection System VC Series

The compact vaporization system does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.

Precision Soap Film Flow Meter

High precision flow rate measurement with one-touch operation.

Precision Soap Film Flow Meter

High precision flow rate measurement with one-touch operation.

Mass Flow Controller SEC-E Series

The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.

Mixed Injection System MV-2000

High stability, compact mixed injection vaporizer system using the new vaporization method, "tornado flow". Suitable for vaporizing liquid sources pyrolyzed easily.

Mixed Injection System Liquid Vaporizer MI-1000/MV-1000 Series

Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.