Application
Semiconductor & FPD
Manufacturing Process Control
Resistivity meter having the 2-channel carbon sensor. Measurement range: 0 - 100.0 MΩ・cm
The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...
The CS-137 offers reliable, unobtrusive round the clock, real-time monitoring of BHF solution concentrations primarily used for wet etching in semiconductor processes.
Carbon sensor resistivity meter. Measurement range: 0 - 100.0 MΩ・cm
Best-selling, compact baking system suitable for a range of liquid source delivery applications. Easy maintenance.
Low running costs thanks to a compact design, plus remarkable versatility
High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.
High precision liquid mass flow controller using the sensor with a unique cooling method. Can control from micro-liter to ultra low flow rate.
The compact vaporization system does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.