Real time interferometric endpoint for depth targeting.

InGaAs Array Detector

The HORIBA Jobin Yvon family of NIR array detectors, the Symphony Series, feature spectroscopic grade InGaAs detectors in a linear array of 512 or 1024 pixels.

Low Concentration HF/HCl/NH3 Monitor HF-960M

High precision, high-speed measurement of low concentrations of HF, HCl, and NH3. Resistance sensor.

PR-PD5 Particle detection system

For use in combination with Manufacturing Devices. Low-cost reticle/mask particle inspection with enhanced versatility and compactness.

Mass Flow Controller SEC-E Series

The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.

MicroHR Spectrometer

The MicroHR is a short focal length Czerny-Turner spectrometer that can be used as an imaging spectrograph or a scanning Monochromator. As a spectrograph, it features either a fixed or micrometer adjustable entrance slit with out unique Quick-Align CCD adapter.

Motorized MicroHR Spectrometer

Available as an imaging spectrograph or scanning monochromator, the new automated MicroHR allows users to make rapid and precise measurements, offering a degree of versatility not found in comparable focal length spectrometers.

MicroHR NIR Spectrometer

The NIR MicroHR is a 140 mm focal length spectrometer featuring gold optics (for increased through-put in the NIR spectral region) and interchangeable gold gratings for optimization of optical components and wavelength range selection.

Mixed Injection System MV-2000

High stability, compact mixed injection vaporizer system using the new vaporization method, "tornado flow". Suitable for vaporizing liquid sources pyrolyzed easily.

Mixed Injection System Liquid Vaporizer MI-1000/MV-1000 Series

Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.