Manufacturing

The TRIAX 180 is a compact imaging spectrometer with high throughput and complete automation.

The TRIAX 190 is the most compact imaging spectrometer available offering both interchangeable triple grating turret and automated dual exit port selection.

The TX-100 Tunable Laser Gas Analyzer simultaneously measures the hydrogen chloride and H2O of the stack gas. Since the single probe method is applied in the optical system of the analyzer, TX-100 can be mounted from...

Integrated Spectroscopic Ellipsometer and Spectroscopic Reflectometer

Multi-Component Gas Analyzer VA-5000 Series is an all-round analyzer that fits today’s measurement needs ...

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.

Single point analysis and automated hyperspectral imaging.

Dual vacuum modes.

Spot sizes from 1.2 mm to 10 µm.