Electric & Electronic Machinery, Instrument

The HORIBA Jobin Yvon family of NIR array detectors, the Symphony Series, feature spectroscopic grade InGaAs detectors in a linear array of 512 or 1024 pixels.

The MicroHR is a short focal length Czerny-Turner spectrometer that can be used as an imaging spectrograph or a scanning Monochromator. As a spectrograph, it features either a fixed or micrometer adjustable entrance slit with out unique Quick-Align CCD adapter.

Available as an imaging spectrograph or scanning monochromator, the new automated MicroHR allows users to make rapid and precise measurements, offering a degree of versatility not found in comparable focal length spectrometers.

The NIR MicroHR is a 140 mm focal length spectrometer featuring gold optics (for increased through-put in the NIR spectral region) and interchangeable gold gratings for optimization of optical components and wavelength range selection.

Endpoint controller for plasma etch cluster tools: Simultaneous Real Time Multi-Chamber - Multi diagnosis monitor

Silicon crystal is widely used in semiconductors. The PHOTOLUMINOR-D has been designed especially for quantitative impurity analysis of silicon crystals with high sensitivity.

The application of photoluminescence for the quality...

The PHOTOLUMINOR-S has been designed for R&D in many applications and provides high performance and easy operation.   High-sensitivity measurement is important for detecting weak photoluminescence...

High sensitive particle detection down to 0.35µm.

High-speed response and compact profile of the CS-131, SC-1 (standard clean) Solution Concentration Monitor makes it the ideal choice for single wafer and batch type cleaning devices.

High-speed response and compact profile make the SC-2 Solution Concentration Monitor the ideal choice for wafer and batch-type cleaning devices