Photovoltaic

The UVISEL NIR spectroscopic ellipsometer extends the UVISEL VIS in the near infrared spectral range up to 2100 nm.

Integrated Spectroscopic Ellipsometer and Spectroscopic Reflectometer

The UVISEL VIS spectroscopic ellipsometer covers the spectral range from 210 to 880 nm, and can be easily extended in both FUV and NIR range (see UVISEL FUV and NIR models). The measurement is performed in a few minutes and is extremely repeatable.

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.