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The UVISEL FUV spectroscopic ellipsometer extends the UVISEL VIS down to 190 nm.
In-Line Spectroscopic Ellipsometer for Web Coater and Roll to Roll Systems
The UVISEL VIS spectroscopic ellipsometer covers the spectral range from 210 to 880 nm, and can be easily extended in both FUV and NIR range (see UVISEL FUV and NIR models). The measurement is performed in a few minutes and is extremely repeatable.
Single point analysis and automated hyperspectral imaging.
Dual vacuum modes.
Spot sizes from 1.2 mm to 10 µm.
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