Metrology

The LB-550, using a dynamic light scattering technique, is able to measure very concentrated suspensions, up to 40% solids in many cases, over a size range of 1nm-6µm.

Achieves dramatic cost reductions in advanced mask inspections

For use in combination with Manufacturing Devices. Low-cost reticle/mask particle inspection with enhanced versatility and compactness.

Low running costs thanks to a compact design, plus remarkable versatility

High sensitive particle detection down to 0.35µm.