Training

  • Reference: GD2
  • Dates:

    • February 19-20, 2018
    • October 10-11, 2018

  • Who should attend: Users of HORIBA Scientific GD spectrometers
  • Duration: 2 days (From 9 am to 5:30 pm)

The goals of this training are to:

  • Get acquainted with the fundamentals of Glow Discharge Optical Emission Spectroscopy
  • Learn how to perform bulk and surface analysis
  • Learn how to prepare and validate a calibrated method (both sputtering rate mode, virtual and layer mode)
  • Get acquainted with depth measurement using the Differential Interferometry Profiling
  • Learn the basic maintenance of the instrument(i.e. cleaning the lamp and the lens, etc..)

This program can be amended based on the requests of the customers present. Moreover, customers are invited to bring samples.

Day 1

General Presentation of the GD Technique and the Instrument

  • Principles of GD plasma
  • Principles of optics and emission spectrometry
  • Description of the instrument
  • Overview of the software
  • Hands-on practical experiments: Analysis of various samples, influence of operating parameters (pressure, power, duty cycle, etc),HDD mode.
  • Procedure for daily check up

Day 2

Operation of the Instrument, Focus on Software

  • Sample analysis with treatment of data
  • Method creation
  • Use of the monochromator
  • Image mode
  • Export/Import – data exchange

Principles of Quantification

  • Sputtering rate in GD calibration
  • Principles of Bulk, depth profile, layer mode calibration
  • Examples of calibrations, use of layered samples, recalibrations and check ups

Day 3

Depth Measurement using the Differential Interferometry profiling

  • Presentation of the basic principle of DiP
  • Hands on practical analysis and software
  • Sample analysis and quantification: Continuation
  • Presentation of advanced features (new patented FSU, plasma cleaning, etc.)

Maintenance