Digital Mass Flow Controller SEC-N100 Series

Digital Mass Flow Controller SEC-N100 Series

For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.

Mass Flow Controller SEC-E Series

Mass Flow Controller SEC-E Series

The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

Pressure Insensitive Mass Flow Controller SEC-Z700X

Pressure Insensitive Mass Flow Controller SEC-Z700X Series

High performance thermal sensor pressure insensitive mass flow module installed with piezo actuator valve. High reliability and all metal.