Gas Control/Analysis (Dry Process)

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...

Best-selling, compact baking system suitable for a range of liquid source delivery applications. Easy maintenance.

The compact vaporization system does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.

Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.