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Home » Semiconductor Products Processes Semiconductor Process Thin Film Control/Analysis

Thin Film Control/Analysis

Chemical Analysis (Wet Process) Front-end Process
Optical Emission Spectroscopy Etching End-point Monitor EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

Emission analysis type end-point monitor intended for end-point detection or plasma condition control in the plasma-based semiconductor thin-film process.

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