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Home » Semiconductor Products Product Lines Liquid Source Vaporization System Auto Refill System

Auto Refill System

POCl3 Auto Refill System VDM Series

POCl3 Auto Refill System

HORIBA's Award Winning Fluid Delivery System (FDM Series) has revolutionised the POCl3 diffusion process by developing a system to automatically deliver bulk liquid POCl3. This Auto Refill System achieves higher uptime, cost reduction, improved process stability and higher safety.

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