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Home » Semiconductor Products Product Lines Pressure Regulator

Pressure Regulator

Digital Auto Pressure Regulator

Digital Automatic Pressure Regulator UR-Z700 series

High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.

Automatic pressure regulators

Automatic Pressure Regulator - UR-7300/Z704 Series

The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...

Wafer Back Side Cooling System GR-300 Series

Wafer Back Side Cooling System GR-300 Series

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.

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