discontinued 해당 제품은 단종되었습니다. 이 페이지는 정보서비스 목적으로만 이용할 수 있습니다.

UVISEL Plus In-Situ

UVISEL PLUS IN SITU Ellipsometry HORIBA FR

In-situ spectroscopic ellipsometer for real-time thin film monitoring

The UVISEL Plus in-situ spectroscopic ellipsometer can be easily mounted on process chambers (PECVD, MOCVD, sputter, evaporation, ALD, MBE) for the real-time control of thin film deposition or etch processes.

The UVISEL Plus in-situ provides the unique combinations of very high speed, sensitivity, dynamic range and accuracy making the instrument able to control deposition / etch at the atomic layer thickness level, even for rapid processes.

Using our new adaptation kit it is possible to use the same ellipsometer for in-situ and benchtop application on a goniometer. Switching between the two configurations and aligning the system is extremely straightforward.

The UVISEL Plus in-situ ellipsometer is driven by the DeltaPsi2 software platform that is common to all HORIBA Jobin Yvon thin film metrology tools. The software provides real-time data acquisition and modelling / reprocessing capabilities. Advanced communication protocols including TCP/IP and RS232 have been designed for production environments and OEM needs.
 

 

 

Segment: Scientific
Manufacturing Company: HORIBA Scientific

 

  • Highest speed and accuracy
  • Fully integrated software package for real-time measurement, modelling and reporting
  • Easy switch between in-situ and ex-situ configurations

 

Obtained information

  • Thin film thickness
  • Optical constants (n,k)
  • Material composition

 

 

 

  • Spectral ranges: 190-920 nm - 190-2100 nm
  • Light source: 75W Xe lamp or 150W Xe lamp
  • Detection: Single point or real-time spectral acquisition using high sensitivity, wide dynamic range PMT detectors or scanning monochromator for in-situ measurement in working environment for thin film deposition/etch control
  • Spot size @300: 50μm , 100μm & 1mm
  • Mechanical adaptation: CF35 or KF40 Flange

제품 문의

HORIBA제품의 자세한 정보를 원하시면, 아래의 양식에 내용을 입력을 부탁드립니다.

* 는 필수입력항목입니다.

Product accessories

Related products

Auto SE
Auto SE

Spectroscopic Ellipsometer for Simple Thin Film Measurement

GD-Profiler 2™
GD-Profiler 2™

Glow Discharge Optical Emission Spectrometer

LabRAM HR Evolution
LabRAM HR Evolution

Confocal Raman Microscope

LabRAM Soleil
LabRAM Soleil

Raman Microscope

LEM Series
LEM Series

Camera Endpoint Monitor based on Real Time Laser Interferometry

MESA-50
MESA-50

X선 형광 분석기

MESA-50K
MESA-50K

X선 형광 분석기

Smart SE
Smart SE

Powerful and Cost Effective Spectroscopic Ellipsometer

UVISEL Plus
UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

XGT-9000
XGT-9000

X선 분석 현미경(Micro-XRF)

XGT-9000SL
XGT-9000SL

X선 분석 현미경 초대형 챔버 모델

XploRA™ PLUS
XploRA™ PLUS

Raman Spectrometer - Confocal Raman Microscope

Auto SE
Auto SE

Spectroscopic Ellipsometer for Simple Thin Film Measurement

Smart SE
Smart SE

Powerful and Cost Effective Spectroscopic Ellipsometer

UVISEL Plus
UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

Corporate