Digital Mass Flow Meter/Controller

Digital Mass Flow Controller SEC-N100 Series

For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

Gas Concentration Monitor

Gas Monitor IR-422

High senility in-line gas monitor of SiF4 and CF4 for chamber cleaning end point monitoring in deposition process. Reduce clean time and gas usage by real-time monitoring.

Vapor Concentration Monitor IR-300

In-line compact vapor concentration monitor, enables MOCVD precursor delivery to be stable.

Digital Automatic Ppressure Regulator

Digital Auto Pressure Regulator

High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.