Motorized MicroHR Spectrometer

Available as an imaging spectrograph or scanning monochromator, the new automated MicroHR allows users to make rapid and precise measurements, offering a degree of versatility not found in comparable focal length spectrometers.

MicroHR NIR Spectrometer

The NIR MicroHR is a 140 mm focal length spectrometer featuring gold optics (for increased through-put in the NIR spectral region) and interchangeable gold gratings for optimization of optical components and wavelength range selection.

Mixed Injection System MV-2000

High stability, compact mixed injection vaporizer system using the new vaporization method, "tornado flow". Suitable for vaporizing liquid sources pyrolyzed easily.

Mixed Injection System Liquid Vaporizer MI-1000/MV-1000 Series

Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.

MP-32S/M

MP-32S/M requires SEM as excitation source and it can evaluate defects, impurities and crystalline construction in micro region.

MP-VS series

MR-VS series are new special instruments for spectrum measurement which employ compact spectrograph and optical fiber.

Easy measurement of cathodoluminescence spectrograph by mounting to SEM.

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

PHOTOLUMINOR-D

Silicon crystal is widely used in semiconductors. The PHOTOLUMINOR-D has been designed especially for quantitative impurity analysis of silicon crystals with high sensitivity.

The application of photoluminescence for the quality...

PHOTOLUMINOR-S

The PHOTOLUMINOR-S has been designed for R&D in many applications and provides high performance and easy operation.   High-sensitivity measurement is important for detecting weak photoluminescence...

Piezo Actuator Valve PV Series

The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.