Industry
Piezo Actuator Valve PV Series
Overview
The Piezo Actuator Valve PV Series consists of piezo actuator valves with metal diaphragms and metal O-rings. Combined with a pressure sensor or flow rate sensor and ratio control unit (PCU series) to create a pressure control or flow rate control system.
Features
- Ultraclean
All metal construction - Wide flow range: from 1 CCM to 50 LM
- High temperature models are available (PV-1000S/2000S)
- Pressure control from an external unit
Manufactured by HORIBA STEC
Specifications
PV-1000
Flow Range | 1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv) |
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Flow Control Range | 2 -100% F.S. |
Valve Type | normally open / close |
Input Signal | 0 - 5VDC |
Responce | less than 0.5 sec. |
Operating Temperature | 0 - 50 °C |
Operating Diffential Pressure | MAX. 300 kPa(a)(max,42psi) |
Pressure Resistance | 1MPa |
Leak Integrity | 5×10-12Pa•m3(He) |
PV-2000
Flow Range | 10/20 LM |
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Flow Control Range | 2 -100% F.S. |
Valve Type | normally open / close |
Input Signal | 0 - 5VDC |
Responce | less than 0.5 sec. |
Operating Temperature | 0 - 50 °C |
Operating Diffential Pressure | MAX. 300 kPa(a)(max,42psi) |
Pressure Resistance | 1MPa |
Leak Integrity | 5×10-12Pa•m3(He) |