Vacuum thermal furnaces require an accurate and stable gas supply, for this mass flow controllers are used to control a number of gases, such as Nitrogen, Hydrogen, Helium and Argon. The main purposes to use these gases are to prevent oxidation and maintain temperature control.

HORIBA’s mass flow controllers are able to control gas accurately with exceptional repeatability, with the benefit of our multi range / multi gas function which allows for reduced inventory for site support.

HORIBA has wide flow ranges from only a few CCM to many 100’s LM.

For applications which require moisture adding to the process to deoxidize the material surface, HORIBA’s vaporizer and liquid mass flow meter are ideal.

HORIBA has several types of vaporizer which support a large number of liquid materials to meet various customer process conditions.

HORIBA is one of the largest mass flow controller suppliers and has a vast experiences in the vacuum thermal furnace market.

Use the image map below to view our product range.

Furnace Mass Flow Controller Mass Flow Controller Mass Flow Controller Liquid Mass Flow Meter Vaporizer

More Application!
Vacuum Carburizing Furnace

flow controller can precisely control the flow rate such as ethylene and hydrogen in vacuum carburizing furnace
In addition, uniformity of carburizing by measuring the exhaust pressure for the furnace with capacitance manometer VG-200 series, and it can contribute to higher productivity