Compact Reticle/Mask Particle Detection System PR-PD3


The PR-PD3 offers excellent throughput, a dependable optical system, and functions that reduce false detections. These features are blundled in a compact package that is designed to minimize running costs. The PR-PD3 also demonstrates great versatility thanks to its 0.5μm detection sensitivity.


  • The compact design.
  • Low maintenance and operating costs
  • Effective function for countering erroneous detection

Manufactured by HORIBA


Specification Attribute

Specification Value

Inspection object

Particles on reticle/mask with or without pellicle


Laser scattering method

Inspection time

Approx. 7 min/2 surfaces (5 inch reticle), Approx. 7 min from inspection start (switch ON) to test result display for two surface (5 inchs) inspection

* High throughput model specific to the glass/pellicle (approx. 4 min. for two surface inspection) is also available.

Detectable particle size

Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent)

Reticle size

5, 6 or 7 inch (Please specify when ordering.)

Reticle cassette (Please specify when ordering)

Applicable to the HORIBA standard cassette for 5, 6, 7 inches as well as stepper cases unique to individual maker for 5, 6 inches. (Single size of reticle and cassette handling is the standard. Contact us as to the multiple cassette handling system.)

Inspection result

Data mapping display on the FPD


Approx. 900 (W) x 1350 (D) x 1590 (H) mm
Approx. 35.4 (W) x 53.1 (D) x 62.6 (H) in
(Dimensions will vary depending on the reticle cassette specifications.)



Installation site

Clean room or clean booth, class 100 or better


23 ±1°C


100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase

Vacuum source

Pressure difference 8.0 x 104 Pa or more, 50 L/min


  • Measurement of particles on masks and reticle blanks in lithography process.
  • In-coming QA inspection and Routine inspection