Featured Products

SEC-400MK3/500MK3

Low cost model of SEC-400 series

Appearance of DigiCPMJ

Integrated management with an in-situ real time monitor "DIGI Series" for next-generation thin-film processes

GD-Profiler

The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin film characterization and process studies.

In-line type Dissolved Ozone Monitor OZ-96i

Ideal for ozone fluid density control in semiconductor production processes

 

LB550

The LB-550, using a dynamic light scattering technique, is able to measure very concentrated suspensions, up to 40% solids in many cases, over a size range of 1nm-6µm.

BHF monitor image

The CS-137 offers reliable, unobtrusive round the clock, real-time monitoring of BHF solution concentrations primarily used for wet etching in semiconductor processes.

PR-PD2HR Particle detection system

Achieves dramatic cost reductions in advanced mask inspections

PR-PD5 Particle detection system

For use in combination with Manufacturing Devices. Low-cost reticle/mask particle inspection with enhanced versatility and compactness.

SEF-400

A basic mass flow meter

HP-480 the industrial ph meter

The HP-480 industrial pH meter is a standard type pH meter that mainly includes frequently used functions.