The UVISEL ER is highly featured and provides extensive capabilities for advanced film and device characterization, while the fully integrated DeltaPsi2 software platform offers a complete acquisition and analysis package to cover a large variety of scientific and industrial applications.

The modular design of the UVISEL spectroscopic ellipsometer enables the use of several configurations of measurements providing several elements of the Mueller Matrix and the calculus of the degree of polarization.


The ultimate flexibility of the UVISEL ER provides the widest range of applications:

  • Material research
  • Display devices
  • Semiconductor
  • Optical coatings
  • Chemical and biological engineering
  • Dynamic studies

Manufactured by HORIBA Scientific


  • Characterization of thickness and optical constants from 190 to 2100 nm
  • Single layer and multilayer stacks
  • All types of materials: semiconductors, dielectrics, polymers, metals, glass, plastics
  • Composition

    • Porosity
    • Graded optical constants
    • Anisotropic structures, uniaxial and biaxial films
    • Film uniformity by area and depth
    • Complex material properties