Metrology

Visualize your sample and measure thin film thickness and optical constants in seconds.

"With Auto SE, routine work will never be the same!"

NEW NIR Extended Spectral Range !

The GD-Profiler 2™ provides fast, simultaneous analysis of all elements of interest including the gases nitrogen, oxygen, hydrogen and chlorine. It is an ideal tool for thin film characterization and process studies.

The LB-550, using a dynamic light scattering technique, is able to measure very concentrated suspensions, up to 40% solids in many cases, over a size range of 1nm-6µm.

Achieves dramatic cost reductions in advanced mask inspections

For use in combination with Manufacturing Devices. Low-cost reticle/mask particle inspection with enhanced versatility and compactness.

Low running costs thanks to a compact design, plus remarkable versatility

High sensitive particle detection down to 0.35µm.