Integrated Spectroscopic Ellipsometer and Spectroscopic Reflectometer

The UVISEL VIS spectroscopic ellipsometer covers the spectral range from 210 to 880 nm, and can be easily extended in both FUV and NIR range (see UVISEL FUV and NIR models). The measurement is performed in a few minutes and is extremely repeatable.

The UVISEL NIR spectroscopic ellipsometer extends the UVISEL VIS in the near infrared spectral range up to 2100 nm.

The UVISEL FUV spectroscopic ellipsometer extends the UVISEL VIS down to 190 nm.

The UVISEL ER-Extended Range spectroscopic ellipsometer covers a wide spectral range from 190 to 2100 nm.

UVISEL VUV Spectroscopic Ellipsometer

The UVISEL VUV ellipsometer provides the best combination of superior VUV performance and experimental flexibility to determine thin film thickness and optical constants across the wavelength range 142 to 880 nm.

Real time interferometric endpoint for depth targeting.

GD-Profiler HR

The HORIBA Scientific GD-Profiler HR™ gives the optimum in terms of resolution and number of elements to solve analytical problems even in the most complex matrices.

Endpoint controller for plasma etch cluster tools: Simultaneous Real Time Multi-Chamber - Multi diagnosis monitor


Products: UVISEL Plus: 190-920 nm | NIR Option: 2100 nm

Measure thin film thickness and optical constants. The reference ellipsometer for research and process development.