Industry
Fiber Optic Type Chemical Concentration Monitor CS-100F1
Overview
Real-time concentration monitoring is made possible by an inline cell that directly integrates into the main piping of the cleaning system. Emphasizing stability, a cell unit type is also available that uses monitor output for feedback control. This keeps chemical solution concentrations within the permissible range and eliminates unnecessary solution changes.
Features
- Concentration follow-up in real-time using in-line cells.
- Cell unit type for higher accuracy
- Safe installation by complete isolation of electrical and measurement sections
Manufactured by HORIBA
Specifications
Model | CS-151F1 | CS-152F1 | CS-150F1 |
Target of measurement | SC-1 (ammonia/hydrogen peroxide aqueous solution) | SC-2 (hydrochloric acid/hydrogen peroxide aqueous solution) | SPM (sulfuric acid/hydrogen peroxide aqueous solution) |
Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible. | |||
Measurement principle | Absorption spectrometry | ||
Concentration computation principle | Temperature-compensated multivariate analysis | ||
Measurement range (mass %)
| NH3 : 0.00% to 1.00% H2O2 : 0.00% to 5.00% H2O : 94.0% to 100.0% | HCI : 0.00% to 2.00% H2O2 : 0.00% to 2.00% H2O : 96.0% to 100.0% | H2SO4 : 70.0% to 96.0% H2O2 : 0.00% to 10.00% H2O : 4.0% to 30.0% |
Repeatability (mass %) (within ±1% room temperature)
| NH3 : ±0.15% H2O2 : ±0.30% H2O : ±1.5% | HCI : ±0.15% H2O2 : ±0.15 % H2O : ±1.5% | H2SO4 : ±0.50% H2O2 : ±0.50% H2O : ±1.5% |
Sample solution temperature | 20 to 80 : (when using Inline cell) 20 to 30 : (when using cell unit) | ||
Measurement cycle | Approx. 3 seconds | ||
Content of | • 1st component: measured concentration value (%) | • Error code |
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LCD and input
| • 2nd component: measured concentration value (%) • 3nd component: measured concentration value (%) • 1st and 2nd components: concentration alarm status | • Parallel concentration alarm output invalid status • Serial/parallel status • Background compensation data |
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RS-232C serial input | • Serial/parallel status switching • Measurement data transfer request • 1st and 2nd component concentration alarm setting | • Parallel concentration alarm output status (valid/invalid) • Target measurement solution switching |
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Parallel input | 12 to 30 V DC (photocoupler insulated) | • Parallel concentration alarm output • Target measurement solution switching • Background compensation |
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Parallel output | Open collector output (photocoupler insulated) Max. current when on: DC 5 mA (no internal protection resistor) Max. ignition voltage when off: 30 V DC
| • 1st component concentration alarm, 4 types • 2nd component concentration alarm, 4 types • Device error • Measuring • Target measurement solution type • Background compensation status |
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Solution temperature input | Terminal block connection (M3 terminal screws) | ||
Analog output | • 1st component concentration alarm, 4 types: 4 to 20 mA • 2nd component concentration alarm, 4 types: 4 to 20 mA * We also support other measurement ranges. Please specify when ordering. | ||
Fiber optic cable | Dedicated CS-100F1 Series fiber optic cable (25 ±15: installation temperature) | ||
ample cell | We can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions. | ||
Power supply | 100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA | ||
Dimensions | 205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part) | ||
Weight | Approx. 11 kg | ||
Analog output | 4 to 20 mA (2 outputs: H2SO4: 50.0 to 100.0 %/H2O: 0.00 to 10.00 %) The analog output can be prepared to correspond to each requirement by users. (Please specify when ordering.) | ||
Power | 24 V DC ±10%, 2 A | ||
Dimensions | 205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13 (D) x 10.6 (H) in | 291 (W) x 329 (D) x 269 (H) mm 11.5 (W) x 13 (D) x 10.6 (H) in | |
Mass | Approx. 11 kg | Approx. 12 kg | |
Connection pipe size | For inlet and outlet: Outer diameter 6 mm (inner diameter 4 mm) | ||
Pipe connection | Nippon Pillar Super type |
Applications
- Cleaning and etching processes in semiconductor manufacturing
Downloads
- Technical Article
Industrial In-line and Multi Component Monitor Using Absorption Spectroscopy and Its Application (1.6MB)
Abstract
"Chemical concentration monitor, HORIBA CS series, is widely used in semiconductor wet process. Its measurement principle, Ultra Violet (UV) and Near Infrared (NIR) absorption spectroscopy, enables in-line and real-time monitoring for multiple component chemistry. Measuring various kinds of samples is achieved, such as Fe ion concentration in HCl, more than 5 component chemistry including by-product from etching, to H2O2 in CMP slurry. In this paper, measurement results for those samples are introduced."