Industry
TMAH/H2O2 Monitor, CS-139E
Overview
The CS-139E is a high-precision chemical concentration monitor designed for use with TMAH/H2O2 solutions used in cleaning processes during semiconductor manufacturing. It offers a faster response speed and a more compact size than anything available to date, and monitors the concentrations of the various components of the SC-1 solutions (TMAH/H2O2/H2O) are used as substitutes for SC-1 on an ongoing basis. Feedback control based on the monitor output is used to keep the concentrations of the TMAH/H2O2 solutions within the allowable ranges and to eliminate unnecessary replacement of chemicals. In addition, a model with an integrated cooling unit is available, allowing accommodation of a broad range of sample temperatures.
Features
- A measurement cycle of approx. 3 seconds supports concentration management for 300 mm processes.
A very short measurement cycle* of approximately two seconds means fast response. Frequent feedback for both single-bath and batch type cleaning devices is supported.
*Does not include chemical replacement and cooling times. - The compact design means less space is needed for the cleaning device.
Because of the compact design, only two-thirds (*) the conventional floor area is required, so less space is needed for the cleaning device. The monitor can be easily integrated with the cleaning device.
*Based on comparison with the CS-220 series by HORIBA. - Fewer lot defects in the cleaning process mean a higher yield.
Output from the monitor is used for replenishment control of the TMAH/H2O2 solutions, enabling cleaning with a high reproducibility rate. There are fewer defects in the cleaning process, and this helps boost the overall yield. - Fully automatic measurement and simple control.
All the user has to do is prepare the TMAH/H2O2 solution. Measurement is fully automatic, so no control whatsoever is required once the measurement has begun. In addition, air is used for reference spectral measurement, so a utility water supply is not needed. - Comprehensive measures to eliminate air bubbles enable measurement of high-temperature samples.
Air bubbles are separated out in a bubble removing tank, while an electromagnetic valve minimizes mixing of air bubbles in the flow cell during measurement. If the monitor has an integrated cooling unit, high-temperature samples can be sent directly to the monitor. Temperature compensation is carried out automatically. - 24 V DC used for higher safety assurance.
Low-voltage 24 V DC is used for the power supply, offering improved safety and protection from electrical shock. An internal leakage sensor can be installed to detect water leaks, so that the supply of TMAH/H2O2 solutions can be shut off in the event of an emergency.
Manufactured by HORIBA Advanced Techno
Specifications
Model specifications | CS-139E: No cooling unit |
Measurement sample | TMAH/H2O2 (TMAH/H2O2 solution) |
Measurement principle | Absorption spectrometry |
Concentration computation principle | Temperature-compensated multivariate analysis |
Measurement range | TMAH: 0.00 to 0.50% |
Reproducibility (Peak to peak) | TMAH: ± 0.10% |
Chemical conditions | CS-139E:
|
Measurement cycle | Approx. 2 seconds minimum |
Equipment temperature | 20 to 25 |
Operation panel | 1) Temperature level display: TMAH, hydrogen peroxide, water |
Serial input/output | RS-232C |
Parallel output | Maximum current when open collector output is ON: 5 mA |
Analog output | 4 to 20 mA (2 outputs: TMAH concentration, H2O2 concentration) *Regardless of the range specifications, the output of 4 ~ 20 mA can be made to correspond to 0 ~ 10% concentrations. |
Power supply | 24 V DC ± 10%, 2 A |
Dimensions | CS-139E: 205 (W) x 329 (D) x 269 (H) mm |
Weight | CS-139: Approx. 11 kg |
Connection pipe size | For input and exhaust: Outer diameter 3 mm (inner diameter 2 mm) |
Pipe connection | Nippon Pillar Super type |