HORIBA Advanced Techno, Co., Ltd. (hereinafter “HORIBA Advanced Techno”) has released its new CS-1000 Chemical Solution Monitoring System.
The CS Series of analyzers, which measures the concentration of chemicals used in semiconductor manufacturing processes in real time, has served the needs of the industry for nearly 30 years since its launch in 1995.
The CS-1000, a stand-alone system boasting improved performance, makes it possible to detect specific chemicals that are present in chemical solutions in trace quantities (ppm*1 level) without any pretreatment, thanks to a unique algorithm (patent pending*2) that combines the analysis of absorbance,*3 conductivity, and pH. By enabling simultaneous measurements of three parameters—concentration (up to eight chemical components), conductivity, and pH—at an update cycle as short as six seconds,*4 the CS-1000 contributes to the advancement of quality control. Since it requires only approximately four hours*5 of maintenance every six months, the CS-1000 also helps to reduce downtime. In addition, the CS-1000 supports the simultaneous measurement of two different chemical solutions, contributing to increased productivity.
With the miniaturization of semiconductors, the chemicals used to manufacture them have become increasingly diverse, such as those containing many components or trace components. This requires strict quality control covering multiple parameters. Measuring low concentration components at the ppm level has been particularly challenging for semiconductor device manufacturers, both because of the need for pretreatment and the difficulty of conducting continuous measurements on a second-by-second basis.
Takuya Onoda, Product Line Manager at HORIBA Advanced Techno, explains, “We developed the CS-1000 as an all-in-one model for supporting the world’s most advanced semiconductor manufacturing technologies by further developing the advanced functions developed in the CS Series. As a stand-alone model, the CS-1000 can be independently installed at any semiconductor production facility. With its expertise in ‘water and liquid measurement,’ HORIBA Advanced Techno is committed to supporting the rapidly advancing semiconductor industry by offering high value-added products and technologies.”
*1 ppm = parts per million. For liquid components, 1 ppm means that 1 mg of a component is present in 1 liter of liquid.
*2 Patent applications have been made in Japan, U.S.A., Korea, and Taiwan.
*3 The degree to which light irradiated on a liquid is absorbed. Since light is absorbed at characteristic wavelengths according to the type of chemical solution and its concentration, the concentration of a solution can be deduced by measuring absorbance.
*4 Measurement/time required may vary depending on application methods and conditions.
*5 Maintenance frequency and time required may vary depending on application methods and conditions.
